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Michael Ilg

Michael Ilg is a PhD student at the department of micro and nanoelectronic systems1 at the Technical University Ilmenau in Germany and working in the Ion Beam Technology group2 under Thomas Schenkel at the Lawrence Berkeley National Laboratory since May 2011. The topic for his work is the conjunction of an ion source with readout and scanning electronic to study the effects of ion implantation in meso-electronic devices. His experiences include ion sources, MEMS for measurement and sensoric and high vacuum setups.

Affiliation
Lawrence Berkeley National Laboratory, USA and Technical University Ilmenau, Germany