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A. Philipossian

Affiliation
University of Arizona, Araca, Inc.

 


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BB4.07 - Aggressive Diamond Characterization and Wear Analysis during Chemical Mechanical Planarization 
Date/Time:
April 3, 2013   11:00am - 11:30am
 
Speaker:
 

 
BB4.08 - Performance of a Novel Slurry Injection System on a Speedfam-IPEC 472 ® Polisher for Inter Layer Dielectric (ILD) Applications 
Date/Time:
April 3, 2013   11:30am - 11:45am
 
Speaker:
 
Taxonomy
slurry 
 

 
2 Results Found, Showing 1 - 2