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LL4.02 - Sequence-Specific Peptoid Oligomers as Bioinspired Materials 
April 3, 2013   8:30am - 9:00am

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Al CMP for Low Resistance Gate Fill for 20nm and Beyond Replacement Metal Gate
High Resolution Topography Characterization at Die-Scale of Front End CMP Processes
Fluorescence Correlation Spectroscopic Investigation of Surface Adsorption of CMP Slurry Additives on Abrasive Particles
Characterization of Chemically Modified Thin Films for Optimization of Metal CMP Applications
Analytical Research of Polishing Pad and the Development of Intelligent Pad