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Tutorial CC: Reliability and Materials Issues of Semiconductor Optical and Electron Devices and Materials 
April 6, 2015   9:00am - 5:00pm

Instructors: Leonard Brillson, The Ohio State University, Matteo Meneghini, University of Padova, Michael Salmon, Evans Analytical Group, Joachim Würfl, Ferdinand-Braun-Institut, Leibniz Institut fuer Hoechstfrequenztechnik. An MRS OnDemand event.

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The Effect of ALD Temperature on Border Traps in Al2O3 InGaAs Gate Stacks
Atomic Layer Deposition of Crystalline SrHfxTi1-xO3 Directly on Ge (001) for High-K Dielectric Applications