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Mid-Career Researcher Award
Materials for Electronics That Can Stretch, Twist, Fold and Flex 
Date/Time:
April 3, 2013   12:15pm - 1:00pm
 
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Characterization of Chemically Modified Thin Films for Optimization of Metal CMP Applications
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Aggressive Diamond Characterization and Wear Analysis during Chemical Mechanical Planarization
Performance of a Novel Slurry Injection System on a Speedfam-IPEC 472 ® Polisher for Inter Layer Dielectric (ILD) Applications