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TIF1.03 - Perspectives on Guiding Innovations from the Lab to Commercialization 
April 4, 2013   10:50am - 11:10am

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Multiscale Characterization of Biomimetic Materials with Structural Hierarchy
Al CMP for Low Resistance Gate Fill for 20nm and Beyond Replacement Metal Gate
High Resolution Topography Characterization at Die-Scale of Front End CMP Processes
Reducing Density-induced CMP Non-uniformity for Advanced Semiconductor Technology Nodes
Slurry Compositions for Polishing Several New Barrier Films