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RR5.02 - Multifunctional Luminescent Nanomaterials: Controlled Fabrication, Properties and Biomedical Applications 
April 3, 2013   2:00pm - 2:30pm

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Al CMP for Low Resistance Gate Fill for 20nm and Beyond Replacement Metal Gate
High Resolution Topography Characterization at Die-Scale of Front End CMP Processes
Reducing Density-induced CMP Non-uniformity for Advanced Semiconductor Technology Nodes
Slurry Compositions for Polishing Several New Barrier Films
Fluorescence Correlation Spectroscopic Investigation of Surface Adsorption of CMP Slurry Additives on Abrasive Particles